FORCE DETECTOR AND MANUFACTURE THEREOF,申请号JP19890105482-传众专利搜索

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发明名称	FORCE DETECTOR AND MANUFACTURE THEREOF
摘要
申请公布号	JPH02283076(A)	申请公布日期	1990.11.20
申请号	JP19890105482	申请日期	1989.04.25
申请人	WAKO:KK	发明人	OKADA KAZUHIRO
分类号	H01L29/84;G01L1/18	主分类号	H01L29/84
代理机构		代理人
主权项
地址

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