| 摘要 |
1. Method of making magnetic head sliders to be used in magnetomotive storages, starting from a flat workpiece (1) out of which several magnetic head sliders equipped with rails (11) and magnetic heads (12) are made simultaneously, the first longitudinal surface (L1) corresponding in its dimension that is vertical to the length of the workpiece (1) to the length (L) of the magnetic head slider, and the second longitudinal surface (L2) that is vertical to the first longitudinal workpiece surface (L1) and equipped with magnetic head (12) having their field line entry and exit surfaces flush with the first longitudinal workpiece surface, as well as with their electrically conductive lands (13) corresponding in dimension that are vertical to their length to the height (H) of the magnetic head sliders, in that first, by means of a masking process, between two respective pairs of magnetic heads (12), recessed regions (9) extending in the direction of the length (L) of the magnetic head slider are made out of the first longitudinal workpiece surface so that magnetic head (12)-equipped rails (11) appear at the front side, the height of said rails depending on the flight height that can be reached with the magnetic head sliders, in that subsequently the rail surfaces are given a predetermined peak-to-valley height by means of lapping, and in that finally the magnetic head sliders are personalized out of the workpiece (1), characterized in that onto the surface regions (8) provided for making the rails (11), of the first longitudinal surface of a highly pure aluminium workpiece (1) with magnetic heads (12) insulated at its second longitudinal surface on corresponding Al2 O3 layers, and with lands (13), 8% oxalic acid is applied to act, via a corresponding mask cover (3) at a temperature of not less than 50 degrees C until under the influence of anodic oxidation aluminum oxide layers (10) form with a thickness of maximum 1 mu m, and that after the removal of the mask cover (3) at least from intermediate regions between the rail surface regions, using the aluminium oxide layers (10) as an etching mask cover, recessed regions (9) are etched by means of wet chemical etching out of these intermediate regions (18) with a depth of at least 10 mu m, with rails (11) being formed simultaneously. |
