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发明名称
Method of fabricating semiconductor device
摘要
申请公布号
US4971922(A)
申请公布日期
1990.11.20
申请号
US19890358491
申请日期
1989.05.30
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
WATABE, KIYOTO;KAMOTO, SATORU
分类号
H01L21/28;H01L21/336;H01L29/49;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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