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发明名称
METHOD OF FABRICATING OXIDE SUPERCONDUCTING FILM
摘要
申请公布号
CA2016354(A1)
申请公布日期
1990.11.19
申请号
CA19902016354
申请日期
1990.05.09
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
HAYASHI, NORIKI;YOSHIDA, NORIYUKI
分类号
C23C14/28;H01L39/24
主分类号
C23C14/28
代理机构
代理人
主权项
地址
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