SEMICONDUCTOR INSPECTION APPARATUS,申请号JP19890102974-传众专利搜索

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发明名称	SEMICONDUCTOR INSPECTION APPARATUS
摘要
申请公布号	JPH02281165(A)	申请公布日期	1990.11.16
申请号	JP19890102974	申请日期	1989.04.21
申请人	TOKYO ELECTRON LTD	发明人	SAEGUSA TAKESHI;SHIBATA JIYUNICHIROU
分类号	G01R31/26;G01R31/28;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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