| 摘要 |
PURPOSE:To miniaturize a device and to simplify an inspection stage by incorporating an electrode pattern which is inspected by a television camera, forming a standard pattern in an image processor and comparing an inspected pattern with the standard pattern so that an inspection is executed. CONSTITUTION:A part of the electrode pattern which is inspected is incorporated by the television camera, processed to be a binary image by the image processor and inputted in an image memory for inspection. Next, boundary coordinate between the black image and the white image of the inputted electrode patterns 1-3 is obtained and whether the image put between contour lines is a black image or a white image is measured to form the standard pattern. The image memory for inspection and a standard pattern memory are operated and a memory for inspection only for a part having a difference is formed, then measurement is performed by the image processor to inspect the electrode pattern. By thus forming the standard pattern from the inspection pattern, the device is miniaturized and the inspection stage is simplified. |
