| 摘要 |
PURPOSE:To precisely control the machining position with YAG laser beam by dividing the laser beam form a second laser beam source scanned together with the laser beam from a first laser beam source and precisely measuring this. CONSTITUTION:The laser beams from the YAG laser beam source (the first) 1 and the He-Ne laser beam source (the second) 2 are overlapped on the same beam path. This laser beam is scanned on the table 11 in two dimensions. In the scanned laser beam, the laser beam from the first laser beam source 1 is transmitted with a beam divider and transmitted onto the table 11 and the laser beam from the second laser beam source 2 is reflected. The shifting quantity of the reflected laser beam from the second laser beam source 2 is precisely measured. The measured laser beam shifting quantity and the command are inputted to control means and the laser beam is scanned. By this method, shift of the position of the laser beam can be corrected. |
