PREPARATION OF THIN FILM CERAMICS BY SOL GEL PROCESSING

摘要

A method of making a mixed sol to produce a titanate-based or zirconate-based ceramic. A metal salt such as lead acetate is dissolved in a stabilising agent such as glacial acetic acid, used in a concentration such that subsequent addition of titanium and zirconium alkoxide sols is effected without precipitation. PZT ceramic films made from the mixed sols have: dielectric constant 150-4000; dielectric loss factor 0.001-0.08; saturation polarisation 0.8 mu C/cm<2>.