| 摘要 |
<p>PURPOSE:To permit the waiting time for restarting to be shortened by exhausting residual gases from adsorbing tanks immediately before stopping a separator and circulating a highly pure product gas from a product tank into the adsorbing tanks to remove gas therefrom. CONSTITUTION:Immediately before stopping a gas separator by an operation terminating process, residual gases are exhausted from adsorbing tanks 1 and 2, after which a highly pure product gas is circulated from a product (nitrogen) tank 20 into the adsorbing tanks 1 and 2 to thereby remove gas from the adsorbing tanks 1 and 2 and the separation operation is then terminated. By such process, the separator operation can be restarted with the adsorbing tanks full of a highly pure product gas and the product gas of a predetermined purity is obtainable in an exceedingly short time when compared with the conventional device which is terminated during exhaust process. The waiting time for the restarting can also be shortened.</p> |
