发明名称 OBSERVING OPTICAL SYSTEM
摘要 PURPOSE:To eliminate the need of switching objective lenses and to facilitate the alteration of an observation magnification by using objective lenses as a fixed objective lens with a fixed magnification and independently providing variable power optical systems for altering an observation magnification. CONSTITUTION:The observing optical device has an observing optical system which variably magnifies the observation image of an object to be tested R into a prescribed magnification with the aid of observation light transmitting the object to be tested R and forms an image. The observing optical system is provided with objective lens systems 3 and 5 with fixed magnifications and variable power optical systems 9 and 11 variably magnifying the observation image caught by the objective lens 3. Since the objective lens 3 is one with a fixed magnification, it is not switched, but the magnification is changed by the independently provided variable power optical systems when the observation magnification is changed. Consequently, sliding part related to objective lens switching is eliminated, dust soiling the object R to be tested is hardly produced, and the troublesome adjustment in the case of altering the magnification is eliminated.
申请公布号 JPH02281223(A) 申请公布日期 1990.11.16
申请号 JP19890101649 申请日期 1989.04.24
申请人 NIKON CORP 发明人 KUMAZAWA MASAHITO;KATO KINYA
分类号 G01N21/84;G01N21/88;G01N21/94;G01N21/956;G02B7/28;G02B15/00;G02B21/18;G02B21/36;H01L21/027;H01L21/30;H01L21/66 主分类号 G01N21/84
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