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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02280333(A)
申请公布日期
1990.11.16
申请号
JP19890102846
申请日期
1989.04.20
申请人
MATSUSHITA ELECTRON CORP
发明人
SHIMAZAKI TOYOYUKI
分类号
H01L23/52;H01L21/3205;H01L21/822;H01L27/04
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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