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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH02280324(A)
申请公布日期
1990.11.16
申请号
JP19890102028
申请日期
1989.04.21
申请人
FUJI ELECTRIC CO LTD
发明人
GOTOU TOMOAKI
分类号
H01L21/302;C23F4/00;H01L21/3065;H01L29/74;H01L29/744
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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