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发明名称
VORRICHTUNG ZUR HERSTELLUNG UND BEARBEITUNG VON HALBLEITERN
摘要
申请公布号
DE4014351(A1)
申请公布日期
1990.11.15
申请号
DE19904014351
申请日期
1990.05.04
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
OHMORI, TOSHIAKI;FUKUMOTO, TAKAAKI, ITAMI, HYOGO, JP
分类号
H01L21/302;H01L21/00;H01L21/205;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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