METHOD FOR FORMING FINE PATTERN,申请号JP19890100921-传众专利搜索

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发明名称	METHOD FOR FORMING FINE PATTERN
摘要
申请公布号	JPH02278711(A)	申请公布日期	1990.11.15
申请号	JP19890100921	申请日期	1989.04.19
申请人	MITSUBISHI ELECTRIC CORP	发明人	FUJINO TAKESHI;MORIIZUMI KOICHI
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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