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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02278849(A)
申请公布日期
1990.11.15
申请号
JP19890100882
申请日期
1989.04.20
申请人
FUJITSU LTD
发明人
MATSUTANI TAKESHI
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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