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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH02278836(A)
申请公布日期
1990.11.15
申请号
JP19890100686
申请日期
1989.04.20
申请人
SEIKO EPSON CORP
发明人
OKA HIDEAKI
分类号
H01L29/78;H01L21/336;H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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