发明名称 CATHODE STRUCTURAL BODY APPARATUS FOR ELECTRON EMISSION
摘要 <p>In one embodiment, an electron emission cathode and a method for its manufacture comprise an electrically conductive flat structure (1) defining an emission surface, into which a slot pattern (7a, 7b) is incorporated, preferably by electro-erosion or laser cutting, such that a current conductor (I), defined by the slots of the slot pattern, is formed between two terminals (9a, 9b) in order to conduct a heating current, the width of the slots and the material thickness of the flat element in significant areas of the same being less than the width (D) of the current conductor (I). <IMAGE></p>
申请公布号 JPH02277766(A) 申请公布日期 1990.11.14
申请号 JP19900006497 申请日期 1990.01.17
申请人 BALZERS AG 发明人 URUSU BEEKUMAN;ARUBERUTO KORAA
分类号 C23C14/22;C23C14/24;H01J1/16;H01J9/04;H01J37/065;H01L21/203 主分类号 C23C14/22
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