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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02278170(A)
申请公布日期
1990.11.14
申请号
JP19890098730
申请日期
1989.04.20
申请人
MATSUSHITA ELECTRON CORP
发明人
OKI SHINICHI
分类号
G01R31/28;H01L21/321;H01L21/60
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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