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发明名称
ELECTRON BEAM-MEASURING APPARATUS
摘要
申请公布号
EP0348785(A3)
申请公布日期
1990.11.14
申请号
EP19890111119
申请日期
1989.06.19
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
PLIES, ERICH, DR. RER. NAT.;OTTO, JOHANN, DIPL.-ING. (FH)
分类号
H01J37/04;H01J37/147;H01J37/153;H01J37/26;(IPC1-7):H01J37/26;G01R31/305
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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