摘要 |
<p>An improved vacuum treatment system comprises containers (2, 2a, 2b, 2c) for accommodating articles (1) to be treated, a tunnel-like casing (3) in which a plurality of the containers can move contiguously, a driving device for making the containers move in the casing, a plurality of evacuation ducts (4a, 4b, 4c, 4d, 4e) opening to the casing at a plurality of locations, sealing devices (6, 6a, 6b) for sealing the clearance between the outer surfaces of the containers and the inner surface of the casing at the positions between the openings, and an evacuation facility (5) for evacuating the inside of the casing through the evacuation ducts. The locations of the evacuation ducts closest to the opposite ends (3A, 3B) of the casing are apart from the ends of the casing farther than the length (l) of the container. The intervals of the locations of the evacuation ducts are preferably longer than the length of the container. There are provided a plurality of tunnel-like casings (3, 3', 3"), the inside of which is evacuated by a single evacuation facility (5) through the evacuation ducts (4a-e, 4a'-e', 4a"-e").</p> |
申请人 |
MITSUBISHI JUKOGYO KABUSHIKI KAISHA |
发明人 |
TAGUCHI, TOSHIO, HIROSHIMA TECHN.INST., MITSUBISHI;OKITA, HAJIME, HIROSHIMA TECHN.INST., MITSUBISHI |