| 摘要 |
PURPOSE:To obtain the microactuator which is reducible in size at low cost by providing a moving mechanism which has a fine moving piece, an attitude detecting means for the moving piece, and a control means which controls the attitude. CONSTITUTION:The microactuator is constituted by providing the moving mechanism 15, photodetecting element 26, and attitude control circuit 27. A light expanded beam 12a from a light emitting element 12 is converted by an optical lens system 25 into a converged beam 12b, and made incident on an optical fiber 13. At this time, the beam 12b irradiates a position on the element 12 corresponding to the inclination of the system (moving piece 16), and four divided elements of the element 26 output voltage signals of levels corresponding to the respective quantities of photodetection. The circuit 27 finds the light convergence position of the beam 12b from the respective voltage signal levels, finds the deviation when the convergence position is aligned with the optical axis of the optical system 25, and finds the inclination of the system 25 for eliminating the deviation quantity, thereby sending out attitude control signals S1 and S2 for adjustment. Consequently, respective electrodes 23 are supplied with charges by amounts indicated by the signals S1 and S2 and the movable piece 16 is rotated in a theta direction with an electrostatic force generated with the moving piece 16, thereby aligning the optical axis of the system 25. |
