| 摘要 |
PURPOSE:To obtain the microactuator which can adjust a device finely by providing a moving mechanism made of a piezoelectric material, plural electrodes provided on beams, and a control circuit which moves a table. CONSTITUTION:The microactuator is constituted by providing the moving mechanism 10, the electrodes 17 - 20 provided on the beams 12 - 15, and the control circuit 21. When the control circuit 21 applies negative voltages having the same voltage level to the electrodes 17 and 18 and positive voltages to the electrodes 19 and 20, the beams 12 and 13 made of piezoelectric materials contract and the beams 14 and 15 expand. Their quantities of variation correspond to the voltage levels and they operate reversely when the voltages are applied reversely. Consequently, the table 16 is balanced and moves as shown by an arrow (a). Further, when the electrodes 17 and 20 are applied with negative voltages and the electrodes 18 and 19 are applied with positive voltages at the same time, the beams 12 and 15 contract and the beams 13 and 14 extend, so that the table 16 turns as shown by an arrow (b). The table rotates reversely when the voltages are applied reversely. Consequently, the fine table 16 can be moved to a desired position and a system to be adjusted is mounted on the table 16 to enable parallel movement and turning on the table plane, thereby adjusting the system to be adjusted finely. |
