| 摘要 |
PURPOSE:To restrain the thermal expansion of a bonding arm caused by heat released from a heater so as to prevent the deviation of bonding positions and the failure of an ultrasonic bonding by a method wherein the bonding arm is cooled down by cooling air. CONSTITUTION:A pipe 2 provided with a few small holes 1 is fitted adjacent to an arm 5, and cooling air blowing off from the small holes 1 of the pipe 2 is made to blow against the arm 5 to keep it constant in temperature. Air supplied to the pipe 2 can be obtained from an air conditioner installed outside this wire bonding device. |
