| 摘要 |
PURPOSE:To give equal probability and irregularity to variance of a join between patterns due to the movement of a stage by using a random number to determine the quantity of the drawing stage movement of patterns at the time of reticle manufacture. CONSTITUTION:A Y-directional drawing pattern is divided into Y-directional stage movement sections 12 by using a random number sequence to determine random numbers in the Y direction first, and then an X-directional random number sequence is generated according to the number of divisions to determine X-directional stage movement sections 11. A stage moving and electron beam control means 8 controls a drawing means 9 by obtaining division information from a drawing pattern dividing means 7 so that electron beam drawing is performed in areas encircled X and Y arrays and after a stage is moved, pattern drawing is performed, thus drawing a pattern on a reticle. Thus, the quantity of stage movement at the time of the pattern drawing in reticle manufacture is determined by the random number sequences. Consequently, the position of a pattern join by the stage movement appears irregularly with equal probability and the appearance of the position shift of the pattern is generated at random correspondingly. |
