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发明名称
FORMING METHOD OF GOLD FILM AND GOLD WIRING
摘要
申请公布号
JPH02275625(A)
申请公布日期
1990.11.09
申请号
JP19890097936
申请日期
1989.04.17
申请人
NEC CORP
发明人
TSUNENARI KINJI
分类号
H01L21/3205;H01L21/28;H01L21/285
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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