FORMATION OF THIN FILM CONSISTING OF SUPERFINE PARTICLE CONTROLLED IN NUMBER OF ATOM,申请号JP19890093067-传众专利搜索

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发明名称	FORMATION OF THIN FILM CONSISTING OF SUPERFINE PARTICLE CONTROLLED IN NUMBER OF ATOM
摘要
申请公布号	JPH02274871(A)	申请公布日期	1990.11.09
申请号	JP19890093067	申请日期	1989.04.14
申请人	KAWASAKI STEEL CORP	发明人	FUJIMURA TORU
分类号	C23C14/32	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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