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发明名称
TARGET FOR SPUTTERING
摘要
申请公布号
JPH02274873(A)
申请公布日期
1990.11.09
申请号
JP19890093089
申请日期
1989.04.14
申请人
TOSHIBA CORP
发明人
ISHIGAMI TAKASHI;SATO MICHIO;YAMANOBE TAKASHI
分类号
C23C14/34
主分类号
C23C14/34
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代理人
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