发明名称 RESIN SEALED SEMICONDUCTOR DEVICE
摘要 PURPOSE:To decrease cracks generated in a cover film, and to improve moisture resistance by forming an opening section to an insulating film and shaping a stepped section to a guard ring formed onto the insulating film and the cover film. CONSTITUTION:A stepped section is generated to a guard ring 7 and a cover film 9 by an opening section 8 shaped in a substrate insulating region 3. Consequently, the film thickness of an insulating film 4 and the guard ring 7 is determined so as not to generate stepped disconnection, thus preventing the increase of the wiring resistance value of the guard ring 7 by shaping the opening section 8. The concentration of stress applied to the peripheral section of a semiconductor substrate from a molding resin, etc., can be dispersed in the multi-directions by the stepped section formed in the guard ring 7 and the cover film 9 by the opening section 8. Accordingly, cracks generated in the guard ring 7 and the cover film 9 can be obviated, thus preventing the defects of an IC such as defective moisture resistance due to the generation of the cracks.
申请公布号 JPH02275656(A) 申请公布日期 1990.11.09
申请号 JP19890097920 申请日期 1989.04.17
申请人 NEC CORP 发明人 TANIGUCHI TOSHIMI
分类号 H01L21/3205;H01L23/28;H01L23/52;H01L29/06;H01L29/41 主分类号 H01L21/3205
代理机构 代理人
主权项
地址