| 摘要 |
PURPOSE:To obtain a probe of desired performance with good repeatability and with a high yield rate by detecting shape of a wire rod, formed into the probe, by an optical method and, being based on its detecting result, controlling electric power applied between the probe and an electrolyte. CONSTITUTION:A probe 2 is immersed in an electrolyte 1 and polished by applying voltage in an ununiform polishing region C-D. The probe 2 is monitored in its constriction part by a camera device 6, and a brightness signal of obtained picture information is converted into a binary code in a picture processor 7 obtaining a picture signal V2. The signal V2 is input to a controller 5 detecting a width in the thinnest part of the constriction part, when the width decreases to not more than a preset value, polishing in an etching region A-B is started by reducing the applied voltage. Then monitoring a current value this time, the polishing advances, and when the constriction part is cut by a weight, a change of current, appearing at this time, is monitored, so that based on the current monitored, the applied voltage is decreased to zero, and the polishing is finished by pulling up the probe 2 from the electrolyte. |
