发明名称 NARROW-BAND LASER DEVICE
摘要 PURPOSE:To decrease the fluctuation of wavelengths due to the deformation of each Fabry-Perot(F-P) etalon by providing the F-P etalon having the narrowest transmission bandwidth out of F-P etalons at a place nearest to the 1st total reflection mirror in the 1st and 2nd total reflection mirrors and a plurality of the F-P etalons which make up an optical resonator. CONSTITUTION:This device is equipped with: a discharge tube 1; total reflecting mirrors 2 and 3; a semi-transparent mirror 4; F-P etalons 5 and 6. An F-P etalon having the narrowest transmission bandwidth out of the F-P etalons is installed at a place nearest to the 1st total reflection mirror 2. As a result, the energy of a light entering into a space where the F-P etalons 5 and 6 are installed decreases up to an extent that energy in the ordinary case is multiplied by transmission factor of the semi-transparent mirror 4. Further, the light attenuated by one F-P etalon enters into the other F-P etalon having the narrowest transmission bandwidth which determines the oscillation wavelength of a laser. The fluctuation of the central wavelengths of a laser light because of the deformation of each F-P etalon is thus decreased.
申请公布号 JPH02273981(A) 申请公布日期 1990.11.08
申请号 JP19890095757 申请日期 1989.04.14
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 WANI KOICHI;SHIMADA YASUHIRO;KAWAHARA HIDETO;MIMASU MUTSUMI
分类号 H01S3/137;H01L21/027 主分类号 H01S3/137
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