| 摘要 |
PURPOSE:To improve the quality of laser processing by providing a means for setting electron density in a discharge domain at the time of the maximum power injection less than or equal to 1X10<14>/cm<3>. CONSTITUTION:A probe 12 is arranged at a part which is not irradiated with laser light, and a part of space charge is picked up from the tip as a current. This signal is amplified by a converter 11 and insulated from the prove 12. An impedance converter 16 converts the impedance of signal. By the command of an MPU 19, a scanner 17 performs contact point scanning, and an A/D converter 18 performs the conversion into digital signal. Dy referring a data file 20, the MPU 19 calculates electron density, and sends out control command. In this case, the electron density in a discharge domain is restricted in a region less than or equal to 1X10<14>/cm<3>. As a result, gain distribution in laser medium gas is stabilized, and the change of laser transversal mode is eliminated, as that the cutting width at the time of cutting process is reduced, and further the roughness of a surface being subjected to cutting process is reduced. Thereby quality can be improved. |
