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发明名称
POLISHING DEVICE AND METHOD FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPH02274464(A)
申请公布日期
1990.11.08
申请号
JP19890097034
申请日期
1989.04.17
申请人
NKK CORP
发明人
SAKAMA HIROSHI;MURAYAMA YOSHIO;OMURA MASAKI
分类号
B24B49/14;B24B55/02
主分类号
B24B49/14
代理机构
代理人
主权项
地址
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