| 摘要 |
<p>PURPOSE:To improve environmental resistance and to reduce cost by providing a sheet substrate laminated with a thin-film resistor on one surface of a hermetically closed vessel. CONSTITUTION:Printing ink consisting of ruthenium 2-ethyl hexanoate, cobalt 2-ethyl hexanoate and resin for thickening is printed in the form of patterns on an alumina sheet of 50mum by screen printing and is calcined at 650 deg.C to form the patterns of resistors. The formed resistors are formed to have 100OMEGA/sq. sheet resistivity, +30ppm coefft. of resistance temp., 50 aspect ratio and 5KOMEGA total resistance. Silver paste is printed on both ends of the resistors and is calcined and thereafter, lead wires are connected by soldering. The alumina sheet is adhered atop the vessel of a hollow shape made of the alumina calcined and produced by a specified method by positioning the resistor part on the inner side of the vessel under 760mmHg internal pressure and a hermetic cap is mounted thereto. The pressure sensor having high environmental resistance is thus obtd.</p> |
