| 摘要 |
PURPOSE:To prevent a noise caused by vibration of a lead wire and to exactly execute a measurement by bringing the whole detecting mechanism to oil immersion. CONSTITUTION:An angle sensor is constituted by assembling orthogonally a driving piezoelectric bimorph element 11 and a piezoelectric bimorph element 12 for detection, and assembling two pairs of them in parallel so as to become a tuning fork structure. In this state, a signal line 13 is drawn out of an electrode of each piezoelectric bimorph element, and connected to a lead pin 14. Also, the whole is sealed in a base 15 and a sealing case 16, oil 17 having viscosity is injected into the case 16, and the whole sensor is brought to oil immersion. Since the piezoelectric bimorph element for detection has a large mass, a ration in which it is brought to damping by the oil 17 is small, and vibration can be detected. The signal line 13 is brought to damping by the oil 17 since its mass is small, and vibration becomes small, therefore, a noise can be prevented. |
