| 摘要 |
PURPOSE: To make manufacture easier with high measurement precision by simultaneously molding a diaphragm, a base and a clamp parts as an integrated ceramics sensor body while a clamp part is set with an interval. CONSTITUTION: A hat-like sensor body 1 which is almost a cylinder comprises a variable diaphragm 2 and a base 3 containing a clamp part 5, and on the surface of a diaphragm 2, several measurement resistors 4 are fixed. The clamp part 5 of the base 3 is, through a flexible transition intermediate part 6 having two curved transition points 6a and 6b of a specified curvature radius, combined to a diaphragm supporting part 3a. The flexible structure prevents a modulus from occurring at the diaphragm, for avoiding occurrence of measurement error. At the center part of the diaphragm 2, a reinforcing part 7 of a certain thickness is provided, so that a large pressure load can be applied. A diaphragm 32 and a base 33 are simultaneously molded in one process together with a clamp part 35 of ceramics material, thus a sensor body 20 is manufactured. |
