发明名称 Cooling method and apparatus for integrated circuit chips
摘要 A method and apparatus for lowering integrated circuit chip ambient temperatures uses negative pressure to induce cooling liquid flow, rather than prior art positive pressure approaches, thereby preventing undesirable cooling liquid leakage outside of the cooling region. The cooling liquid is deaerated to eliminate performance degrading air bubbles, which are a by-product of the negative pressure approach.
申请公布号 US4967832(A) 申请公布日期 1990.11.06
申请号 US19890457640 申请日期 1989.12.27
申请人 NRC CORPORATION 发明人 PORTER, WARREN W.
分类号 H01L23/473 主分类号 H01L23/473
代理机构 代理人
主权项
地址