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发明名称
METHOD FOR ETCHING GALLIUM-ARSENIC SINGLE CRYSTAL
摘要
申请公布号
JPH02272000(A)
申请公布日期
1990.11.06
申请号
JP19890094069
申请日期
1989.04.13
申请人
HITACHI CHEM CO LTD
发明人
YOSHIDA MASATO;SHIMIZU ICHIJI;ISHIBASHI HIROYUKI;SUSA KENZO
分类号
C30B29/42;C30B33/10
主分类号
C30B29/42
代理机构
代理人
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地址
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