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发明名称
PLASMA APPARATUS
摘要
申请公布号
JPH02271626(A)
申请公布日期
1990.11.06
申请号
JP19890094239
申请日期
1989.04.13
申请人
SUMITOMO METAL IND LTD
发明人
IWAMA NOBUHIRO;HAYAMIZU TOSHIYASU
分类号
C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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