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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH02270962(A)
申请公布日期
1990.11.06
申请号
JP19890093530
申请日期
1989.04.13
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NISHIKAWA YUKIO;TANAKA KUNIO;YOSHIDA ZENICHI
分类号
C23C14/34;C23C14/28;C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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