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经营范围
发明名称
RESIST COATING APPARATUS
摘要
申请公布号
JPH02271518(A)
申请公布日期
1990.11.06
申请号
JP19890093467
申请日期
1989.04.12
申请人
NEC CORP
发明人
ISHIZAKA HIROYUKI
分类号
G03F7/16;B05C11/08;H01L21/027
主分类号
G03F7/16
代理机构
代理人
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地址
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