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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02271538(A)
申请公布日期
1990.11.06
申请号
JP19890093579
申请日期
1989.04.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
KONO YASUTAKA;OKU TOMOKI
分类号
H01L29/812;H01L21/033;H01L21/285;H01L21/338;H01L29/08;H01L29/417;H01L29/423
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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