| 摘要 |
PURPOSE:To obtain stable laser beams by providing many fins in a heat exchanger, and supplying laser medium gas from the outside in the longitudinal direction of the heat exchanger, and changing the sectional area of a gas passage in the longitudinal direction of a case taperingly. CONSTITUTION:In a heat exchanger 8, many fins 8c are provided vertically to a discharge electrode 3, and laser medium gas is supplied from the outside in the longitudinal direction of the heat exchanger 8, and the sectional area of a gas passage in the longitudinal direction of a case 5 is changed taperingly. Accordingly, the passage between the case 5 and the heat exchanger 8 becomes narrower the more it goes downward, and the gas by the amounts that the passage has become narrow is pushed out toward the heat exchanger 8, so the gas flops uniformly in the heat exchanger. Since many fins 8c are attached to a cooling pipe in the heat exchanger 8, the gas flow after passing the heat exchanger becomes uniform and vertical to the heat exchanger 8 and hereby, it also becomes a uniform flow between discharge electrodes as well, and stable laser beams can be obtained. |
