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发明名称
Wafer supporting apparatus
摘要
申请公布号
US4969168(A)
申请公布日期
1990.11.06
申请号
US19890401654
申请日期
1989.08.31
申请人
CANON KABUSHIKI KAISHA
发明人
SAKAMOTO, EIJI;HARA, SHINICHI;SHIMODA, ISAMU;UZAWA, SHUNICHI
分类号
G03F7/20;H01L21/027;H01L21/30;H01L21/683
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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