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发明名称
Apparatus for plasma treatment
摘要
申请公布号
US4968918(A)
申请公布日期
1990.11.06
申请号
US19880214179
申请日期
1988.07.01
申请人
KANEBO, LTD.
发明人
KONDO, YOSHIKAZU;TSUDA, YUKIO;YAMAMOTO, TOSHIHIRO
分类号
B29C59/14;C23C16/54;D06M10/02;H01J37/32
主分类号
B29C59/14
代理机构
代理人
主权项
地址
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