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发明名称
APPARATUS FOR REMOVING FOREIGN MATTER
摘要
申请公布号
JPH02271622(A)
申请公布日期
1990.11.06
申请号
JP19890093704
申请日期
1989.04.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
MOMOTAKE YASUHITO
分类号
B08B1/02;B08B1/04;H01L21/304
主分类号
B08B1/02
代理机构
代理人
主权项
地址
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