| 摘要 |
<p>PURPOSE:To use the thermal flow rate sensor while fixing the sensor in the state wherein an accurate measurement can be taken by connecting one side of lead wire, which forms a triangle, to the electrode part of a substrate type accurate temperature sensor. CONSTITUTION:On a substrate 11 of alumina which is 2mm wide 5mm long, and 0.3mm thick, a temperature sensing film 12 is formed of platinum to 0.5mum and a laser trimming method is employed for about 500OMEGA grooving and resistance value adjustment. An insulating film 15 is formed of SiO2 thereupon to 3mum except the electrode part 13. Then the lead wire 14 forming a triangular shape consisting of lead-out parts 41 and 42 from an inflection point 43 as two sides and a fixation part 45 from an inflection point 44 and a fixation part 48 from an inflection part 47 as one side is formed of a platinum wire of 0.1mm in thickness at one electrode part, and connected to the electrode part 13 by welding at weld points 47 and 49. Further, the electrode part 13 is protected by a coating 16 of glass paste. Similarly, a lead wire 16 and a coating 16 are formed at the other electrode part similarly. Consequently, the sensor can be fixed in a stable state.</p> |
