| 发明名称 |
SUSCEPTOR FOR VAPOR GROWTH OF SEMICONDUCTOR |
| 摘要 |
PURPOSE:To prepare a susceptor for vapor growth by providing carbon-confined layers on the surface of a carbon body layer, which layers are better than the body layer in conductivity. |
| 申请公布号 |
JPS52146174(A) |
申请公布日期 |
1977.12.05 |
| 申请号 |
JP19760062684 |
申请日期 |
1976.05.29 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
KAWANABE ASAJI |
| 分类号 |
C30B25/12;C23C16/46;H01L21/205 |
主分类号 |
C30B25/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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