SOL GEL PROCESS FOR PREPARING Pb(Zr,Ti)O3 THIN FILMS

摘要

A method for preparing crack free transparent ferroelectric polycrystalline Pb(Zr,Ti)O3 thin films (PZT or PLZT) and other complex oxide thin films by a sol-gel process and the product thereof is described. A stock solution containing the organic precursors to the metal oxides together with a chelating agent may be spin coated onto a flat substrate or dip coated or painted onto a curved substrate or even metallic wire, and subsequently dried and fired. The addition of firing additives to the solution prevents cracking of the film. Alternatively an intermediate layer of Al2O3 or other oxide may be deposited on the substrate before deposition of the PZT or other oxide materials.