A micromechanical actuator has a movable part, such as a membrane, bending beam or the like, which can be moved relative to a stationary part by a combination of electromagnetic and electrostatic forces. The manufacturing technology and applications of the actuator are described. The actuator is of very compact, integrated design.
申请公布号
DE3914031(A1)
申请公布日期
1990.10.31
申请号
DE19893914031
申请日期
1989.04.28
申请人
MESSERSCHMITT-BOELKOW-BLOHM GMBH, 8012 OTTOBRUNN, DE
