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发明名称
DIFFUSION METHOD FOR IMPURITY
摘要
申请公布号
JPS5478970(A)
申请公布日期
1979.06.23
申请号
JP19770146159
申请日期
1977.12.07
申请人
OKI ELECTRIC IND CO LTD
发明人
TSUBONE HITOSHI;OOSHIMA MITSUO
分类号
C30B31/02;H01L21/22;H01L21/322
主分类号
C30B31/02
代理机构
代理人
主权项
地址
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